Development of a high-precision microfluidic differential pressure sensor

Shipulya Natalya Dmitrievna

This paper presents the results of development of the differential microfluidic pressure sensor. The principle this structure is based on the differential pressure in the microfluidic Wheatstone bridge. This microfluidic bridge is a prototype of the Wheatstone electric bridge, only with a replacement electrical to microfluidic lines. The advantage of such a sensor was the absence of numerous regulating mechanical valves and membranes, creating measurement errors. A prototype microfluidic system of silicon and glass was created to test the behavior of the microfluidic Wheatstone bridge. Practice has shown that in the experimental sample laminar flow regime is preserved, there is no turbulence. This principle of measuring differential pressure is unique and innovative.

Keywords:differential pressure sensor, microfluidics, microfluidic Wheatstone bridge, autocalibration